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Fabrication of atomic force microscope probe with low spring constant using SU-8 photoresist

Lee, J; Shin, H; Kim, S; Hong, S; Chung, J; Park, H; Moon, J, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.42, no.10A, pp.L1171 - L1174, 2003-10

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