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Simulation of optical constants range of high-transmittance attenuated phase-shifting masks used in KrF laser and ArF laser

Kim, E; Moon, SY; Kim, YH; Yoon, HS; No, Kwangsoo, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.39, no.11, pp.6321 - 6328, 2000-11

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