Browse "MS-Journal Papers(저널논문)" by Subject KRF
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| Optical property simulation of single-layer halftone phaseshifting masks for DUV microlithography Jiang, ZT; Hong, Daniel Seungbum; Kim, E; Bae, Byeong-Soo; No, Kwangsoo; Hwangbo, CK; Lim, SC; et al, SEMICONDUCTOR SCIENCE AND TECHNOLOGY, v.11, no.10, pp.1450 - 1455, 1996-10 |
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