Browse "MS-Journal Papers(저널논문)" by Subject H-2 gas
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| Effect of H-2 addition during PECVD on the moisture barrier property and environmental stability of H:SiNx film Kim, Jin Kyoo; Jeong, Wooseok; Lee, Seunghee; Jeong, Sehun; Park, Sang-Hee Ko, JOURNAL OF THE AMERICAN CERAMIC SOCIETY, v.104, no.12, pp.6670 - 6677, 2021-12 |
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