Browse "MS-Journal Papers(저널논문)" by Subject ECRCVD
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| Surface morphology control of epitaxial silicon films grown by hot wire chemical vapor deposition using hydrogen dilution Lee, Seung Ryul; Ahn, Kyung Min; Kang, Seung Mo; Ahn, Byung Tae, SOLAR ENERGY MATERIALS AND SOLAR CELLS, v.94, no.3, pp.606 - 611, 2010-03 |
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