Influences of depostion parameters on the crystallographic orientation of reactively sputtered AlN thin films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, HC | ko |
| dc.contributor.author | Yong, YJ | ko |
| dc.contributor.author | Lee, Jai Young | ko |
| dc.date.accessioned | 2013-02-25T09:04:37Z | - |
| dc.date.available | 2013-02-25T09:04:37Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1994 | - |
| dc.identifier.citation | EUROPEAN JOURNAL OF SOLID STATE AND INORGANIC CHEMISTRY, v.13, pp.513 - 522 | - |
| dc.identifier.issn | 0992-4361 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/61026 | - |
| dc.language | English | - |
| dc.publisher | Elsevie | - |
| dc.title | Influences of depostion parameters on the crystallographic orientation of reactively sputtered AlN thin films | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 13 | - |
| dc.citation.beginningpage | 513 | - |
| dc.citation.endingpage | 522 | - |
| dc.citation.publicationname | EUROPEAN JOURNAL OF SOLID STATE AND INORGANIC CHEMISTRY | - |
| dc.contributor.nonIdAuthor | Lee, HC | - |
| dc.contributor.nonIdAuthor | Yong, YJ | - |
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