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Results 1-3 of 3 (Search time: 0.003 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations

Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01

2
Integrated Scheduling of a Dual-Armed Cluster Tool for Maximizing Steady Schedule Patterns

Kim, Woojin; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SYSTEMS, MAN, AND CYBERNETICS: SYSTEMS, v.51, no.12, pp.7282 - 7294, 2021-12

3
Cleaning Plan Optimization for Dual-Armed Cluster Tools With General Chamber Cleaning Periods

Lee, Tae-Gyung; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.3, pp.1890 - 1906, 2023-07

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