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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Modeling, Analysis, and Scheduling of Cluster Tools With Two Independent Arms Tonke, Daniel; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1176 - 1188, 2016-04 | |
Feedback Control of Cluster Tools for Regulating Wafer Delays Kim, Chulhan; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1189 - 1199, 2016-04 | |
Schedulability Analysis for Noncyclic Operation of Time-Constrained Cluster Tools With Time Variation Kim, Hyunjung; Lee, Jun-Ho; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.3, pp.1409 - 1414, 2016-07 | |
Optimal Scheduling of Transient Cycles for Single-Armed Cluster Tools With Parallel Chambers Kim, Dae-Kyu; Lee, Tae-Eog; Kim, Hyunjung, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1165 - 1175, 2016-04 |
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