Results 11-15 of 15 (Search time: 0.003 seconds).
NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Optimal scheduling for sequentially connected cluster tools with dual-armed robots and a single input and output module Kim, Dae-Kyu; Kim, Hyunjung; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.55, no.11, pp.3092 - 3109, 2017-07 | |
Optimal Scheduling of Transient Cycles for Single-Armed Cluster Tools With Parallel Chambers Kim, Dae-Kyu; Lee, Tae-Eog; Kim, Hyunjung, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1165 - 1175, 2016-04 | |
Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.11, no.2, pp.525 - 536, 2014-04 | |
Scheduling Lot Switching Operations for Cluster Tools Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.26, no.4, pp.592 - 601, 2013-11 | |
Scheduling dual-armed cluster tools with cleaning processes Kim, Hee-Jung; Kim, Hyunjung; Lee, Jun-Ho; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.51, no.12, pp.3671 - 3687, 2013-06 |
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