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Results 1-6 of 6 (Search time: 0.009 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Scheduling Algorithms for Minimizing Tardiness of Orders at the Burn-in Workstation in a Semiconductor Manufacturing System

Kim, Yeong-Dae; Kang, Jae-Hun; Lee, Gyeong-Eun; Lim, Seung-Kil, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.24, no.1, pp.14 - 26, 2011-02

2
Feedback Control of Cluster Tools for Regulating Wafer Delays

Kim, Chulhan; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1189 - 1199, 2016-04

3
Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots

Lee, Tae-Eog; Lee, HY; Lee, SJ, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.45, no.3, pp.487 - 507, 2007-02

4
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations

Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01

5
Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations

Yu, Tae Sun; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.15, no.2, pp.705 - 716, 2018-04

6
Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation

Lim, Yuchul; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.1, pp.375 - 388, 2020-01

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