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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Modeling, Analysis, and Scheduling of Cluster Tools With Two Independent Arms Tonke, Daniel; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1176 - 1188, 2016-04 | |
Feedback Control of Cluster Tools for Regulating Wafer Delays Kim, Chulhan; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1189 - 1199, 2016-04 | |
A simulation study on lot release control, mask scheduling, and batch scheduling in semiconductor wafer fabrication facilities Kim, Yeong-Dae; Lee, DH; Kim, JU; Roh, HK, JOURNAL OF MANUFACTURING SYSTEMS, v.17, no.2, pp.107 - 117, 1998 |
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