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Results 1-2 of 2 (Search time: 0.006 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Feedback Control of Cluster Tools for Regulating Wafer Delays

Kim, Chulhan; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1189 - 1199, 2016-04

2
Schedule Restoration for Single-Armed Cluster Tools

Kim, Ja-Hee; Zhou, MengChu; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.27, no.3, pp.388 - 399, 2014-08

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