Search
Results 1-1 of 1 (Search time: 0.003 seconds).
| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| SECAM: A Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment, Lee, JH; Lee, Tae-Eog, IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.1, pp.41 - 58, 2004-03 |