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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Cleaning Plan Optimization for Dual-Armed Cluster Tools With General Chamber Cleaning Periods Lee, Tae-Gyung; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.3, pp.1890 - 1906, 2023-07 |