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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1516 - 1526, 2021-07 | |
Scheduling of Dual-Gripper Robotic Cells With Reinforcement Learning Kim, Hyun-Jung; Lee, Jun-Ho, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.19, no.2, pp.1120 - 1136, 2022-04 |
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