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NO	Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1	Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01
2	Cleaning Plan Optimization for Dual-Armed Cluster Tools With General Chamber Cleaning Periods Lee, Tae-Gyung; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.3, pp.1890 - 1906, 2023-07

Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)

Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01

Lee, Tae-Gyung; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.3, pp.1890 - 1906, 2023-07

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