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| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| l1 Trend Filtering-Based Change Point Detection for Pumping Line Balance of Deposition Equipment Ahn, Jeongsun; Kim, Duyeon; Song, Mingi; Min, Jaehong; Hwang, Jimin; Kwon, Juhye; Kim, Hyun-Jung, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.35, no.1, pp.137 - 145, 2022-02 |