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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Feedback Control of Cluster Tools for Regulating Wafer Delays Kim, Chulhan; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1189 - 1199, 2016-04 | |
Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots Lee, Tae-Eog; Lee, HY; Lee, SJ, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.45, no.3, pp.487 - 507, 2007-02 | |
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01 | |
Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations Yu, Tae Sun; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.15, no.2, pp.705 - 716, 2018-04 | |
Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation Lim, Yuchul; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.1, pp.375 - 388, 2020-01 |
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