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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Cyclic Scheduling of Cluster Tools With Nonidentical Chamber Access Times Between Parallel Chambers Kim, Dae-Kyu; Jung, Yu-Ju; Jung, Chi-Hyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.25, no.3, pp.420 - 431, 2012-08 |