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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Scheduling cluster tools for concurrent processing of two wafer types with PM sharing Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.53, no.19, pp.6007 - 6022, 2015-10 |
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