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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Scheduling single-armed cluster tools with reentrant wafer flows Lee, HY; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.19, no.2, pp.226 - 240, 2006-05 | |
Token Delays and Generalized Workload Balancing for Timed Event Graphs with Application to Cluster Tool Lee, Tae-Eog; Lee, Hwan-Yong; Sreenivas, Ramavarapu S., Proceeding of the 2006 IEEE Cinference on Automation Science and Engineering, pp.93-99, 2006 |
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