Results 1-2 of 2 (Search time: 0.007 seconds).
NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
---|---|
Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1516 - 1526, 2021-07 | |
Integrated Scheduling of a Dual-Armed Cluster Tool for Maximizing Steady Schedule Patterns Kim, Woojin; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SYSTEMS, MAN, AND CYBERNETICS: SYSTEMS, v.51, no.12, pp.7282 - 7294, 2021-12 |
Discover