Browse "IE-Journal Papers(저널논문)" by Subject Dual-armed cluster tool
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| K-Cyclic Schedules and the Worst-Case Wafer Delay in a Dual-Armed Cluster Tool Roh, Dong-Hyun; Lee, Tae-Gyung; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.32, no.2, pp.236 - 249, 2019-05 |
| The Impact of Processing Time Variations on Swap Sequence Performance in Dual-Armed Cluster Tools Lee, Jun-Ho; Kim, Hyun-Jung, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.4, pp.2668 - 2677, 2023-10 |
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