Browse "IE-Journal Papers(저널논문)" by Author Kwon, Juhye

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l1 Trend Filtering-Based Change Point Detection for Pumping Line Balance of Deposition Equipment

Ahn, Jeongsun; Kim, Duyeon; Song, Mingi; Min, Jaehong; Hwang, Jimin; Kwon, Juhye; Kim, Hyun-Jung, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.35, no.1, pp.137 - 145, 2022-02

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