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Equipment and Operations Automation in the Semiconductor Industry Morrison, James R; Chien, CF; Dauzere-Peres, S; Dawande, M; Ding, H; Pettinato, JS; Yi, JG, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.8, no.1, pp.1 - 4, 2011-01 |
Modelling and analysis of semiconductor manufacturing in a shrinking world: challenges and successes Chien, CF; Dauzere-Peres, S; Ehm, H; Fowler, JW; Jiang, ZB; Krishnaswamy, S; Lee, Tae-Eog; et al, EUROPEAN JOURNAL OF INDUSTRIAL ENGINEERING, v.5, no.3, pp.254 - 271, 2011 |
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