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Showing results 1 to 6 of 6

1
Cluster tool design comparisons via simulation

Park, Kyungsu; Morrison, James R, 7th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM), Winter Simulation Conference, pp.1877 - 1887, MASM, 2011-12

2
Control of wafer release in multi cluster tools

Park, Kyungsu; Morrison, James R, 8th IEEE International Conference on Control and Automation, pp.1481 - 1487, ICCA, 2010-06

3
Performance bounds for hybrid flow lines: Fundamental behavior, practical features and application to linear cluster tools

Park, Kyungsu; Morrison, James R, 8th IEEE International Conference on Automation Science and Engineering , IEEE CASE, 2012-08

4
Performance evaluation of deterministic flow lines: Redundant modules and application to semiconductor manufacturing equipment

Park, Kyungsu; Morrison, James R, 6th Annual IEEE Conference on Automation Science and Engineering , pp.45 - 50, IEEE CASE, 2010-08

5
Performance models for dual-arm cluster tools

Park, Kyungsu; Ahn, Younghun; Morrison, James R, 2011 World Congress on Intelligent Control and Automation, WCICA, 2011-06

6
Wafer admission control for clustered photolithography tools

Park, Kyungsu; Morrison, James R, Advanced Semiconductor Manufacturing Conference , pp.220 - 225, ASMC, 2010-07

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