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College of Natural Sciences(자연과학대학)Dept. of Chemistry(화학과)CH-Journal Papers(저널논문)

High resolution single-component resists based on terpolymers having photoacid-generating camphorsulfonyloxymaleimide units

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dc.contributor.authorKim, S.-T.ko
dc.contributor.authorKim, Jin-Baekko
dc.contributor.authorKim, J.-M.ko
dc.contributor.authorChung, C.-M.ko
dc.contributor.authorAhn, K.-D.ko
dc.date.accessioned2013-02-25T07:16:00Z-
dc.date.available2013-02-25T07:16:00Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1997-
dc.identifier.citationJOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, v.10, no.3, pp.489 - 492-
dc.identifier.issn0914-9244-
dc.identifier.urihttp://hdl.handle.net/10203/60494-
dc.description.abstract[No abstract available]-
dc.languageEnglish-
dc.publisherTechnical Association of Photopolymers-
dc.titleHigh resolution single-component resists based on terpolymers having photoacid-generating camphorsulfonyloxymaleimide units-
dc.typeArticle-
dc.identifier.scopusid2-s2.0-0542380891-
dc.type.rimsART-
dc.citation.volume10-
dc.citation.issue3-
dc.citation.beginningpage489-
dc.citation.endingpage492-
dc.citation.publicationnameJOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY-
dc.identifier.doi10.1116/1.578176-
dc.contributor.localauthorKim, Jin-Baek-
dc.contributor.nonIdAuthorKim, S.-T.-
dc.contributor.nonIdAuthorKim, J.-M.-
dc.contributor.nonIdAuthorChung, C.-M.-
dc.contributor.nonIdAuthorAhn, K.-D.-
dc.subject.keywordAuthorCamphorsulfnyloxymaleimide-
dc.subject.keywordAuthorPhoto-acid generation-
dc.subject.keywordAuthorTerpolymers-
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CH-Journal Papers(저널논문)
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