DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chang Y.S. | ko |
dc.contributor.author | Lee H.Y. | ko |
dc.contributor.author | Fowler J.W. | ko |
dc.date.accessioned | 2013-02-25T07:14:29Z | - |
dc.date.available | 2013-02-25T07:14:29Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2004-11 | - |
dc.identifier.citation | PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE, v.218, no.11, pp.1577 - 1590 | - |
dc.identifier.issn | 0954-4054 | - |
dc.identifier.uri | http://hdl.handle.net/10203/60489 | - |
dc.description.abstract | For the past few years, integrated machines (i.e. cluster tools) in wafer fabrication have been widely used to achieve reductions in cycle time, contamination, operator handling, capital costs and required floor space. The integration among several processing steps can lead to savings in cycle time, labour costs and inventory, and often provides a dramatic opportunity for yield improvement by preventing contamination. However, because of its complex configurations, modelling and analysis on the activities of an integrated machine is not an easy task. In this paper, a hybrid approach is introduced in order to model and to analyse the activities of the integrated machine. | - |
dc.language | English | - |
dc.publisher | Professional Engineering Publishing Ltd | - |
dc.subject | CLUSTER TOOL PERFORMANCE | - |
dc.subject | PETRI NETS | - |
dc.subject | THROUGHPUT | - |
dc.subject | SIMULATION | - |
dc.title | A hybrid approach for modelling and analysis of an integrated machine | - |
dc.type | Article | - |
dc.identifier.wosid | 000228737600013 | - |
dc.identifier.scopusid | 2-s2.0-9744248621 | - |
dc.type.rims | ART | - |
dc.citation.volume | 218 | - |
dc.citation.issue | 11 | - |
dc.citation.beginningpage | 1577 | - |
dc.citation.endingpage | 1590 | - |
dc.citation.publicationname | PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE | - |
dc.identifier.doi | 10.1243/0954405042418437 | - |
dc.contributor.localauthor | Lee H.Y. | - |
dc.contributor.nonIdAuthor | Chang Y.S. | - |
dc.contributor.nonIdAuthor | Fowler J.W. | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | integrated machine | - |
dc.subject.keywordAuthor | modelling | - |
dc.subject.keywordAuthor | analysis | - |
dc.subject.keywordPlus | CLUSTER TOOL PERFORMANCE | - |
dc.subject.keywordPlus | PETRI NETS | - |
dc.subject.keywordPlus | THROUGHPUT | - |
dc.subject.keywordPlus | SIMULATION | - |
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