ENHANCED PLASMA ETCH RESISTANCE OF ACRYLIC ACID-CALCIUM ACETATE MODIFIED POLY(METHYLMETHACRYLATE)
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | CHOI, JO | ko |
| dc.contributor.author | Kim, Sang Youl | ko |
| dc.contributor.author | MOORE, JA | ko |
| dc.contributor.author | CORELLI, JC | ko |
| dc.contributor.author | STECKL, AJ | ko |
| dc.date.accessioned | 2013-02-25T05:51:31Z | - |
| dc.date.available | 2013-02-25T05:51:31Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1987 | - |
| dc.identifier.citation | JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.5, no.1, pp.382 - 385 | - |
| dc.identifier.issn | 1071-1023 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/60385 | - |
| dc.language | English | - |
| dc.publisher | AMER INST PHYSICS | - |
| dc.title | ENHANCED PLASMA ETCH RESISTANCE OF ACRYLIC ACID-CALCIUM ACETATE MODIFIED POLY(METHYLMETHACRYLATE) | - |
| dc.type | Article | - |
| dc.identifier.wosid | A1987G053900083 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 5 | - |
| dc.citation.issue | 1 | - |
| dc.citation.beginningpage | 382 | - |
| dc.citation.endingpage | 385 | - |
| dc.citation.publicationname | JOURNAL OF VACUUM SCIENCE TECHNOLOGY B | - |
| dc.identifier.doi | 10.1116/1.583908 | - |
| dc.contributor.localauthor | Kim, Sang Youl | - |
| dc.contributor.nonIdAuthor | CHOI, JO | - |
| dc.contributor.nonIdAuthor | MOORE, JA | - |
| dc.contributor.nonIdAuthor | CORELLI, JC | - |
| dc.contributor.nonIdAuthor | STECKL, AJ | - |
| dc.type.journalArticle | Article | - |
- Appears in Collection
- CH-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
This item is cited by other documents in WoS
| ⊙ Detail Information in WoSⓡ | Click to see |  |
| ⊙ Cited 1 items in WoS | Click to see citing articles in |  |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.