Preparation, Properties and Characterization of Thin Ferroelectric Films of Lead Titanate

Abstract

Lead titanate thin films with a perovskite structure were successfully fabricated on titanium and borosilicate glass substrate by chemical vapor deposition. These films were characterized according to crystal structure, composition, and optical properties. Semiquantitative compositional analysis of the deposited films was carried out with x-ray photoelectron spectroscopy (XPS). From the XPS analysis, no other impurities can be detected on the film after 3.5 keV Ar+ cleaning. The lead titanate layer deposited onto the titanium substrate has a columnar structure and grows along the [001] preferred orientation. The stoichiometry of PbTiO3 has almost similar results regardless of deposition parameters. The optical transmittance of PbTiO3 film is influenced by the grain morphology of PbTiO3 deposit.