Browse "CBE-Journal Papers(저널논문)" by Subject KEV PARTICLE BOMBARDMENT
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| Atomic scale simulation of physical sputtering of silicon oxide and silicon nitride thin films Kim, DH; Lee, GH; Lee, SY; Kim, DoHyun, JOURNAL OF CRYSTAL GROWTH, v.286, no.1, pp.71 - 77, 2006-01 |
| Molecular dynamics simulation of energetic ion bombardment onto a-Si(3)N(4) surfaces Kim, DH; Kim, DoHyun; Lee, KS, JOURNAL OF CRYSTAL GROWTH, v.230, no.1-2, pp.285 - 290, 2001-08 |
| Plasma sputtering of silicon dioxide substrate by low energy Ar ion bombardment: molecular dynamics simulation Kim, DH; Lee, SY; Kim, DoHyun, JOURNAL OF CRYSTAL GROWTH, v.237, pp.217 - 222, 2002-04 |
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