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Density Multiplication of Sub 5 nm Supramolecular Dendrimer Patterns on Block Copolymer Assisted High Resolution Trenches Park, Heejin; Lee, Juhwan; Lee, Wonmoo; Jung, Hee-Tae, NANO KOREA 2022 Symposium, Korea Nanotechnology Research Society (KoNTRS), 2022-07-07 |
Density Multiplication of Sub 5 nm Supramolecular Dendrimer Patterns on Block Copolymer Assisted High Resolution Trenches Park, Heejin; Lee, Juhwan; Lee, Wonmoo; Jung, Hee-Tae, 6th International Symposium on Directed Self-Assembly (DSA 2022), KAIST, 2022-10-21 |
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