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Preparation of BST thin films on Pt electrode on Si wafer with down-flow LSMCVD reactor

Chung, HJ; Kim, JH; Moon, WS; Park, SeungBin; Hwang, CS; Lee, MY; Woo, Seong-Ihl, 3rd Pacific Rim conference on the Applications of Ferroelectric Materials, pp.59 - 62, 1996

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