Growth of Ti on Si(111)-7 7 Surface and the Formation of Epitaxial C54 TiSi2 on Si(111) Substrate

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Publisher
한국진공학회
Issue Date
1992
Language
Korean
Citation

한국진공학회지, v.1, no.1, pp.67 - 72

ISSN
1225-8822
URI
http://hdl.handle.net/10203/59927
Appears in Collection
MS-Journal Papers(저널논문)
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