DC Field | Value | Language |
---|---|---|
dc.contributor.author | M.K.Gong | ko |
dc.contributor.author | Kwon, Young Se | ko |
dc.date.accessioned | 2013-02-25T04:20:17Z | - |
dc.date.available | 2013-02-25T04:20:17Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1991-12 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS, PART 1 : REGULAR PAPERS AND SHORT NOTES & REVIEW PAPERS, v.30, no.12B, pp.3893 - 3895 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://hdl.handle.net/10203/59797 | - |
dc.description.abstract | The integration of a PIN photodiode and a vertical junction field effect transistor (VJFET) is useful for optoelectronic integrated circuit (OEIC) since the structure is compact and has potentially high power and high speed capabilities. A GaAs VJFET with the gate connected to PIN was fabricated. The fabricated PIN has a low leakage current, below 50 nA at 10 V bias. Two step atmospheric pressure metalorganic chemical vapor deposition (AP MOCVD) was used and the second step epitaxial layers were selectively grown using silicon dioxide (SiO2) mask. The gate p-layer has a tungsten (W) layer on it and was doped by carbon to prevent autodoping during the second step epitaxy. This VJFET has an improved current-voltage characteristics than the one without W on p-gate layer. | - |
dc.language | English | - |
dc.publisher | Japan Soc Applied Physics | - |
dc.subject | GAAS | - |
dc.title | Integration of PIN and Vertical Junction Field Effect Transistor for Photodetector Optoelectronic Integrated Circuit | - |
dc.type | Article | - |
dc.identifier.wosid | A1991HF42800076 | - |
dc.type.rims | ART | - |
dc.citation.volume | 30 | - |
dc.citation.issue | 12B | - |
dc.citation.beginningpage | 3893 | - |
dc.citation.endingpage | 3895 | - |
dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS, PART 1 : REGULAR PAPERS AND SHORT NOTES & REVIEW PAPERS | - |
dc.identifier.doi | 10.1143/JJAP.30.3893 | - |
dc.contributor.localauthor | Kwon, Young Se | - |
dc.contributor.nonIdAuthor | M.K.Gong | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | PIN | - |
dc.subject.keywordAuthor | VJFET | - |
dc.subject.keywordAuthor | OEIC | - |
dc.subject.keywordAuthor | AUTODOPING | - |
dc.subject.keywordAuthor | RIE | - |
dc.subject.keywordAuthor | SIT | - |
dc.subject.keywordPlus | GAAS | - |
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