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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Journal Papers(저널논문)

Effects of R.F. Power and Total Gas Pressure on the Properties of R. F. Sputtered a-Si:H

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Lee, H. K. / Lee, Choochon
Publisher
한국물리학회
Issue Date
1983
Language
English
Citation

JOURNAL OF KOREAN PHYSICAL SOCIETY, v.16, no.1, pp.64 - 71

ISSN
0374-4884
DOI
10.3938/jkps.16.64
URI
http://hdl.handle.net/10203/59146
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