Effects of Lattice Damages on Impurity Depth Profiles in BF2+ Ion Implanted Silicon
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | M.C.Paek | ko |
| dc.contributor.author | Lim, Ho Bin | ko |
| dc.contributor.author | O.J.Keon | ko |
| dc.contributor.author | S.W.Kang | ko |
| dc.date.accessioned | 2013-02-25T00:48:12Z | - |
| dc.date.available | 2013-02-25T00:48:12Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1990 | - |
| dc.identifier.citation | SURFACE & COATINGS TECHNOLOGY, v.43, pp.986 | - |
| dc.identifier.issn | 0257-8972 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/58514 | - |
| dc.language | English | - |
| dc.publisher | Elsevier Science Sa | - |
| dc.title | Effects of Lattice Damages on Impurity Depth Profiles in BF2+ Ion Implanted Silicon | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 43 | - |
| dc.citation.beginningpage | 986 | - |
| dc.citation.publicationname | SURFACE & COATINGS TECHNOLOGY | - |
| dc.contributor.localauthor | Lim, Ho Bin | - |
| dc.contributor.nonIdAuthor | M.C.Paek | - |
| dc.contributor.nonIdAuthor | O.J.Keon | - |
| dc.contributor.nonIdAuthor | S.W.Kang | - |
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