OPTIMIZATION OF SOLVENT DEVELOPMENT IN RADIATION-INDUCED GRAFT LITHOGRAPHY OF POLY(METHYLMETHACRYLATE)

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Publisher
AMER INST PHYSICS
Issue Date
1986
Language
English
Article Type
Article
Citation

JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.4, no.1, pp.403 - 408

DOI
10.1116/1.583343
URI
http://hdl.handle.net/10203/57259
Appears in Collection
CH-Journal Papers(저널논문)
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