EFFECT OF DEPOSITION PARAMETERS ON THE DEPOSITION CHARACTERISTICS OF CHEMICALLY VAPOR-DEPOSITED PBTIO3

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Publisher
ELSEVIER SCIENCE SA LAUSANNE
Issue Date
1988-11
Language
English
Article Type
Article
Citation

THIN SOLID FILMS, v.165, no.1, pp.291 - 302

ISSN
0040-6090
URI
http://hdl.handle.net/10203/56757
Appears in Collection
MS-Journal Papers(저널논문)
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