The Bond Structures and Properties of Chemically Vapor Deposited Amorphous SiC
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, YJ | ko |
| dc.contributor.author | Park, YW | ko |
| dc.contributor.author | Chun , Soung Soon | ko |
| dc.date.accessioned | 2013-02-24T09:03:18Z | - |
| dc.date.available | 2013-02-24T09:03:18Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1988-02 | - |
| dc.identifier.citation | THIN SOLID FILMS, v.166, no.1, pp.367 - 374 | - |
| dc.identifier.issn | 0040-6090 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/55924 | - |
| dc.language | English | - |
| dc.publisher | Elsevier Science Sa | - |
| dc.title | The Bond Structures and Properties of Chemically Vapor Deposited Amorphous SiC | - |
| dc.type | Article | - |
| dc.identifier.wosid | A1988R487100042 | - |
| dc.identifier.scopusid | 2-s2.0-0024127476 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 166 | - |
| dc.citation.issue | 1 | - |
| dc.citation.beginningpage | 367 | - |
| dc.citation.endingpage | 374 | - |
| dc.citation.publicationname | THIN SOLID FILMS | - |
| dc.contributor.localauthor | Chun , Soung Soon | - |
| dc.contributor.nonIdAuthor | Park, YJ | - |
| dc.contributor.nonIdAuthor | Park, YW | - |
| dc.description.isOpenAccess | N | - |
| dc.type.journalArticle | Article | - |
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