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Characterization of two by two electron-beam microcolumn array aligned with field emission array Park, JY; Lera, JD; Choi, HJ; Buh, GH; Kang, CJ; Jung, JH; Choi, SS; et al, Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.16, no.2, pp.826 - 828, 1998-03 |
Fabrication of multiple microcolumn array combined with field emission array Park, JY; Lera, JD; Yakshin, MA; Choi, SS; Lee, Y; Chun, KJ; Lee, JD; et al, Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.15, no.6, pp.2749 - 2753, 1997-11 |
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