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High resolution single-component resists based on terpolymers having photoacid-generating camphorsulfonyloxymaleimide units

Kim, S.-T.; Kim, Jin-Baek; Kim, J.-M.; Chung, C.-M.; Ahn, K.-D., JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, v.10, no.3, pp.489 - 492, 1997

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