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Chemically amplified resists containing vinyllactam derivatives

Kim, Jin-Baek; Jung, M.-H.; Cheong, J.-H.; Kim, J.-Y.; Bok, C.-K.; Koh, C.-W.; Baik, K.-H., JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, v.10, no.3, pp.493 - 502, 1997

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