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Ultrahigh Density Sub-10 nm TiO2 Nanosheet Arrays Using Si-Containing Block Copolymer Lithography and Atomic Layer Deposition

Bak, Chang-Hong; Ku, Se Jin; Jo, Gyeong Cheon; Choi, Soo Young; Ha, Jae Wook; Kim, Jin-Baek, E-MRS 2014 SPRING MEETING , European Materials Research Society (E-MRS), 2014-05-26

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