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Fabrication of multiple microcolumn array combined with field emission array

Park, JY; Lera, JD; Yakshin, MA; Choi, SS; Lee, Y; Chun, KJ; Lee, JD; et al, Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.15, no.6, pp.2749 - 2753, 1997-11

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