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Electron and ion kinetics in magnetized capacitively coupled plasma source Lee, SH; You, SJ; Chang, Hong-Young; Lee, JK, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.25, pp.455 - 463, 2007-05 |
Role of low-frequency power in dual-frequency capacitive discharges Ahn, Seung Kyu; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.95, no.11, 2009-09 |
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