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Anomalous evolution of Ar metastable density with electron density in high density Ar discharge Park, Min; Chang, Hong-Young; You, Shin-Jae; Kim, Jung-Hyung; Shin, Yong-Hyeon, PHYSICS OF PLASMAS, v.18, no.10, 2011-10 |
Collisional effect on the time evolution of ion energy distributions outside the sheath during the afterglow of pulsed inductively coupled plasmas Lee, J. B.; Chang, Hong-Young; Seo, S. H., PLASMA SOURCES SCIENCE & TECHNOLOGY, v.22, no.6, 2013-12 |
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