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Optical properties of Er-doped silicon rich silicon oxide(SRSO) films deposited by electron cyclotron resonance-plasma enhanced chemical vapor deposition(ECR-PECVD) = ECR PECVD 방법으로 증착한 Er 이 도핑된 SRSO 박막에서의 광학적 특성연구link Seo, Se-Young; 서세영; et al, 한국과학기술원, 1998 |
Power dissipation and mode transition in an RF discharge with multi-hollow cathode electrode Lee, Yun-Seong; Lee, Hun-Su; Chang, Hong-Young, THIN SOLID FILMS, v.518, pp.6682 - 6685, 2010-09 |
The trend of electron temperature and electron density in the process of microcrystalline silicon solar cells Lee, Yun-Seong; In, Jung-Hwan; Ahn, Seung-Kyu; Seo, Sang-Hun; Chang, Hong-Young; You, Dong-Joo; Ahn, Seh-Won; et al, CURRENT APPLIED PHYSICS, v.10, pp.S234 - S236, 2010-03 |
플라즈마 화학 증착법으로 제작한 미세 결정 규소 박막의 특성에 관한 연구 = Charaterization of microcrystalline silicon films drepared by plasma enhanced chemical vapor depositionlink 최광열; Choi, Kwang-Yeol; 신성철; 이주천; et al, 한국과학기술원, 1996 |
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