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Time evolution of electronegativity in a pulsed inductively coupled oxygen plasma Lee, Jeong-Beom; Seo, Sang-Hun; Chang, Hong-Young, THIN SOLID FILMS, v.518, pp.6573 - 6577, 2010-09 |
원거리 플라즈마를 이용한 CVD(Chemical Vapor Deposition)에 관한 연구 = The study on the plasma enhanced chemical vapor deposition(RPECVD)link 전부일; Jeon, Bu-Il; et al, 한국과학기술원, 2000 |
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