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Showing results 1 to 2 of 2

1
A study on low dielectric material deposition using a helicon plasma source

Kim, JH; Seo, SH; Yun, SM; Chang, Hong-Young; Lee, KM; Choi, CK, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.143, no.9, pp.2990 - 2995, 1996-09

2
Enhanced Nucleation of High-k Dielectrics on Graphene by Atomic Layer Deposition

Park, Yong Hyun; Kim, Mi Hye; Bin Kim, Soo; Jung, Hae Jun; Chae, Kwanbyung; Ahn, Yeong Hwan; Park, Ji-Yong; et al, CHEMISTRY OF MATERIALS, v.28, no.20, pp.7268 - 7275, 2016-10

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